TOK manufactures g-Line photoresist materials for applications with film thickness from 1um to 7um for the 436nm wavelength. We manufacture both positive and negative photo resists in our g-Line product lineup. All g-Line photoresists are manufactured in our facilities in Japan. If you have a project and are searching for a g-Line photoresist solution, please contact us and we can provide more specific data about our product lineup.

TOK manufactures i-Line photoresist materials for applications with film thickness from 0.3um to 7um for the 365nm wavelength. We manufacture both positive and negative photo resists in our i-Line product lineup. TOK i-Line photoresists are manufactured in our facilities in the US and Japan. If you have a project and are searching for an i-Line photoresist solution, please contact us and we can provide more specific data about our product lineup.

TOK manufactures KrF photoresist materials for applications with film thickness from 0.3um to 3um for the 248nm wavelength. We manufacture both positive and negative photo resists in our KrF product lineup. TOK KrF photoresists are manufactured in our facilities in Taiwan and Japan. If you have a project and are searching for an KrF photoresist solution, please contact us and we can provide more specific data about our product lineup.

TOK manufactures ArF photoresist materials in the 193nm range giving us an unrivaled and comprehensive lineup of products and services. We manufacture both positive and negative photo resists in our top of the line ArF & ArF Immersion manufacturing facility in Japan. If you have a project and are searching for an ArF & ArF Immersion photo resist solution, please contact us and we can provide more specific data about our product lineup.

TOK is working in cooperation with SEMATECH and other industry leaders to provide viable products which can meet the difficult targets required for EUV photoresists. TOK will continue to lead the industry as we progress forward towards this difficult technology. For more information about EUV solutions, please feel free to contact us.